SILICON NITRIDE ETCHING APPARATUS
Transene’s Etching Apparatus is precision made glassware for etching with Transetch N, tetramethylammonium hydroxide solutions (TMAH), EDP solutions such as PSE-300 and PSE-300F, and other materials requiring operation at the boiling point.
ETCHING APPARATUS SIZES:
MODEL NUMBER | FOR SLICES UP TO: | BEAKER DIMENSIONS: |
800 Special Order |
1 3/4″ diameter (24 slice capacity) |
4 1/16″ x 6″ (Inner Diameter x Height) |
2500 Special Order |
140 cps | 5 3/16″ x 8 1/2″ (Inner Diameter x Height) |
4000 Special Order |
2 1/4″ diameter (30 slice capacity) |
6″ x 8 1/2″ (Inner Diameter x Height) |
5000 | 3 1/4″ diameter (34 slice capacity) |
6 3/8″ x 8 1/2″ (Inner Diameter x Height) |
8000-4 | 4 ” diameter (24 slice capacity) |
8″ x 8 1/2″ (Inner Diameter x Height) |
10,000 | 6 ” diameter (24 slice capacity) |
9 3/8″ x 8 1/2″ (Inner Diameter x Height) |
* Custom sizes available on request.
NOTE: Slice capacity listed above may be doubled by arranging wafers back-to-back in the basket. Glassware is fabricated from quartz. Baskets, supports, and handles are fabricated from fluoropolymer. Available as complete sets or individual components.