SILICON NITRIDE ETCHING APPARATUS

Transene’s Etching Apparatus is precision made glassware for etching with Transetch N, tetramethylammonium hydroxide solutions (TMAH), EDP solutions such as PSE-300 and PSE-300F, and other materials requiring operation at the boiling point.

ETCHING APPARATUS SIZES:

MODEL NUMBER FOR SLICES UP TO: BEAKER DIMENSIONS:
800
Special Order
1 3/4″ diameter
(24 slice capacity)
4 1/16″ x 6″
(Inner Diameter x Height)
2500
Special Order
140 cps 5 3/16″ x 8 1/2″
(Inner Diameter x Height)
4000
Special Order
2 1/4″ diameter
(30 slice capacity)
6″ x 8 1/2″
(Inner Diameter x Height)
5000 3 1/4″ diameter
(34 slice capacity)
6 3/8″ x 8 1/2″
(Inner Diameter x Height)
8000-4 4 ” diameter
(24 slice capacity)
8″ x 8 1/2″
(Inner Diameter x Height)
10,000 6 ” diameter
(24 slice capacity)
9 3/8″ x 8 1/2″
(Inner Diameter x Height)

*  Custom sizes available on request.

NOTE:  Slice capacity listed above may be doubled by arranging wafers back-to-back in the basket. Glassware is fabricated from quartz. Baskets, supports, and handles are fabricated from fluoropolymer. Available as complete sets or individual components.