SILICON NITRIDE ETCHING APPARATUS

Transene’s Etching Apparatus is precision made glassware for etching with Transetch N, tetramethylammonium hydroxide solutions (TMAH), EDP solutions such as PSE-300 and PSE-300F, and other materials requiring operation at the boiling point.

ETCHING APPARATUS SIZES:

MODEL NUMBER	FOR SLICES UP TO:	BEAKER DIMENSIONS:
800 Special Order	1 3/4″ diameter (24 slice capacity)	4 1/16″ x 6″ (Inner Diameter x Height)
2500 Special Order	140 cps	5 3/16″ x 8 1/2″ (Inner Diameter x Height)
4000 Special Order	2 1/4″ diameter (30 slice capacity)	6″ x 8 1/2″ (Inner Diameter x Height)
5000	3 1/4″ diameter (34 slice capacity)	6 3/8″ x 8 1/2″ (Inner Diameter x Height)
8000-4	4 ” diameter (24 slice capacity)	8″ x 8 1/2″ (Inner Diameter x Height)
10,000	6 ” diameter (24 slice capacity)	9 3/8″ x 8 1/2″ (Inner Diameter x Height)

* Custom sizes available on request.

NOTE: Slice capacity listed above may be doubled by arranging wafers back-to-back in the basket. Glassware is fabricated from quartz. Baskets, supports, and handles are fabricated from fluoropolymer. Available as complete sets or individual components.