RUTHENIUM ETCHANT RU-44
Transene Ruthenium Etchant RU-44 is a ceric ammonium nitrate / nitric acid etching solution for all types of evaporated ruthenium films. Etch rate will depend upon substrate ruthenium density and process conditions. In general, the etch time usually ranges from 15 to 55 seconds at room temperature (25°C). The etchant can be supplied with an added surfactant (Ruthenium Etchant RU-44S ). Ruthenium Etchant RU-44 is suitable for sub-micron photolithography applications. For faster etch results, Transene Chromium Cermet Etchant TFE may be used.
Storage and Handling:
Store at room temperature away from direct sunlight, keep container sealed when not in use. This is an acid oxidizing solution and should be handled with caution. In case contact is made to eyes or skin, flush with large quantities of water and contact a physician if irritation persists.
PROPERTIES OF TRANSENE RUTHENIUM ETCHANT RU-44
|How do I increase the etch rate?||1. The rate will approximately double with every 10°C increase in temperature.
2. Increase the rate of stirring or agitation.
|How do I reduce the etch rate?||Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%.|
|Do I need to dilute the etchant?||No, it is ready to use.|
|How do I reduce undercutting?||Increase the rate of stirring or agitation.|
|Etch Rate at 40°C||40 Å/sec.|
|Etch Capacity (rate declines at ~70%)||65 g/gallon|
|Shelf Life||1 year|
|Recommended Operating Temperatures||20-80oC (30-40oC most common)|
|Photoresist Recommendations||PKP Type II or HARE SQ (SU-8 type)|
|Select Compatible Materials||Au, Ti, oxide, nitride, Si
See http://transene.com/etch-compatibility/ for more details.
|Select Incompatible Materials||Al, Ni, Cu, NiCr, Cr|
|Compatible Plastics||HDPE, PP, Teflon, PFA, PVC|
|Country of Origin||USA|
|Available Sizes||Quart, Gallon, 5 Gallon, 55 Gallon|
|Incompatible Chemicals||Strong bases|