Stable post-etch ash residue remover.
Sequestrox 300 is an aqueous alkaline post etch residue remover compatible with gold, tantalum, titanium and silicon dioxide. Sequestrox 300 may be operated at temperatures as low as 40 °C, but higher temperatures will speed ash removal without compromising compatibility.
|Composition||Alkaline Pyrocatechol Based|
|Boiling Point||118 °C|
|Operating Temperature||100 °C (may be used as cool as 40 °C)|
|Metallization||Attacks Al, Cu
Does not attack Au, Ta, Ti
Mild attack on Ag