SEQUESTROX 300

Stable post-etch ash residue remover.

DESCRIPTION

Sequestrox 300 is an aqueous alkaline post etch residue remover compatible with gold, tantalum, titanium and silicon dioxide. Sequestrox 300 may be operated at temperatures as low as 40 °C, but higher temperatures will speed ash removal without compromising compatibility.

PROPERTIES

Property Description
Appearance Amber-yellow liquid
Composition Alkaline Pyrocatechol Based
Boiling Point 118 °C
Operating Temperature 100 °C (may be used as cool as 40 °C)
Rinse Water
Metallization Attacks Al, Cu
Does not attack Au, Ta, Ti
Mild attack on Ag
SiO2 Negligible