Advanced Materials for Electronics

TETRAMETHYLAMMONIUM HYDROXIDE – TMAH

DESCRIPTION:

Transene tetramethylammonium hydroxide (TMAH) is available as 25%, 10%, and 5% standard aqueous solutions. TMAH is an effective etchant and chelating agent ideal for removing residue and contaminants from semiconductor and electronic components.

Product Name: Tetramethylammonium Hydroxide 25% LM
Product Description: Tetramethylammonium Hydroxide 25%
Shelf Life: 1 year

Assay Parameter Unit Specification LM Grade
Assay % 24.50-25.50%
Halide (as Cl) ppm 5 max
Carbonate (CO3) ppm 300 max
Silver ppb 3
Aluminum ppb 3
Calcium ppb 3
Cobalt ppb 3
Chromium ppb 3
Copper ppb 3
Iron ppb 3
Potassium ppb 3
Sodium ppb 3
Nickel ppb 3
Zinc ppb 3