Microchrome Technology Products

Negative and Reversal Process Chemistries:
Emulsion Negative Process Sheet

Step	Time (In Minutes)	Description
1)	—	Expose photoplate. Determine exposure empirically.
2)	4	D-5 Developer. Develop with gentle agitation at room temp. (70°F +/- 1°F). Develop in tank, or ATP Processing methods.
3)	2	Rinse with filtered DI water using immersion or spray.
4)	2 – 5	F-4 Fixer. fix at room temp. (70°F +/- 1°F). Determine empirically the first fix times.
5)	2	Rinse with filtered DI water using immersion or spray.
6)	2	PCS-605 Cleaning Solution. Clean the plates at room temp. Use cleanroom foam wipes to gently scrub the surface.
7)	4	Rinse vigorously with filtered DI water using immersion or spray.
8)	Dry	Dry in clean, class 100 or better environment. If rinser/dryer is used, all humidity MUST be exhausted out of the room. If alcohol is used, ascertain that it is extremely clean and contains no contaminates.

Note: Use PCS-605 Photomask Cleaning Solution to reclean masks after handling.
Shorter process times may be used if ATP processing is implemented.

TECHNICAL NOTE:

1. Agitate plate for 5 seconds every 30 seconds for the develop
step. Agitate 5 seconds every minute for the remainder of
the steps.

2. Use fresh chemistry–change as often as required/needed.