Selective, controllable etchant for application in semiconductor fabrication and thin film microelectronics technology.
Niobium Etchant Nb-41 is designed for etching evaporated deposits. Excellent resolution, compatibility with both positive and negative photoresists, and minimal undercutting are readily achieved. Because Nb-41 is based on a hydrofluoric acid -nitric acid formulation, oxides are incompatible.
Niobium Etchant Nb-41 is supplied ready to use. Constant agitation during etching is required to achieve consistent, uniform results. Etch rates may vary depending on the density of the deposit, temperature, and degree of agitation. Glass containers must be avoided. Gold is compatible with Nb-41.
PROPERTIES OF TRANSENE NIOBIUM ETCHANT Nb-41
|How do I increase the etch rate?||1. The rate will approximately double with every 10°C increase in temperature.
2. Increase the rate of stirring or agitation.
|How do I reduce the etch rate?||Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%.|
|Do I need to dilute the etchant?||No, it is ready to use.|
|How do I reduce undercutting?||Increase the rate of stirring or agitation.|
|Etch Rate at 20°C||25-30 Å/sec|
|Etch Capacity (rate declines at ~70%)||65 g/gallon|
|Shelf Life||1 year|
|Recommended Operating Temperatures||20-80oC (30-40oC most common)|
|Photoresist Recommendations||KLT6000 Series, KLT 5300 Series, HARE SQT (SU-8 type), TRANSIST, or PKP-Type II|
|Select Compatible Materials||Au, Cu, Cr
See https://transene.com/etch-compatibility/ for more details.
|Select Incompatible Materials||Glass, oxide, nitride, GaAs|
|Compatible Plastics||HDPE, PP, Teflon, PFA, PVC|
|Country of Origin||USA|
|Available Sizes||Quart, Gallon, 5 Gallon, 55 Gallon|
|Incompatible Chemicals||Strong bases|
|Additional Information||Contains HF!|