Ti-Tungsten TiW-30
Ti-Tungsten TiW-30 is a selective etchant for titanium-tungsten adhesion layers in microelectronics applications. TiW-30 effectively etches Ti-tungsten films deposited on silicon nitride, or silicon oxide. TiW-30 provides excellent definition and etch rate control. Broad compatibility with positive and negative photoresists is offered.
APPLICATION:
Ti-Tungsten TiW-30 etchant is a ready-to-use solution specifically designed to remove titanium-tungsten alloy adhesion layers from substrates such as silicon dioxide and silicon nitride. TiW-30 will not attack aluminum films. Heating the etchant to 40°C will speed the etch rate for thicker films.
PROPERTIES OF TRANSENE Ti-TUNGSTEN TiW-30
How do I increase the etch rate? | 1. The rate will approximately double with every 10°C increase in temperature. 2. Increase the rate of stirring or agitation. |
How do I reduce the etch rate? | Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%. |
Do I need to dilute the etchant? | No, it is ready to use. |
How do I reduce undercutting? | Increase the rate of stirring or agitation. |
Appearance | Clear, colorless |
pH | Mild acid |
Etch Rate at 40°C | 10-15 Å/sec. |
Etch Capacity (rate declines at ~70%) | 65 g/gallon |
Shelf Life | 6 months |
Storage Conditions | -40 to 0 oC |
Filtration | 0.2 um |
Recommended Operating Temperatures | 20-80oC (30-40oC most common) |
Rinse | Deionized water |
Photoresist Recommendations | KLT6000 Series, KLT 5300 Series, HARE SQ (SU-8 type), TRANSIST, or PKP-308PI |
Select Compatible Materials | Au, glass, oxide, nitride, Ni, Cu
See https://transene.com/etch-compatibility/ for more details. |
Select Incompatible Materials | Ti |
Compatible Plastics | HDPE, PP, Teflon, PFA, PVC |
Country of Origin | USA |
Availability | 1-2 days |
Available Sizes | Quart, Gallon, 5 Gallon, 55 Gallon |
Packaging | HDPE |
Packing | 4 gallons/case |
Isotropy | Isotropic |
Incompatible Chemicals | Flammables, combustibles |
Additional Information | Oxidizer. Store with vented cap. |