Tin Oxide
Indium Tin Oxide Etchant TE-100
Tin Oxide/Indium Tin Oxide Etchant TE-100 is a selective etchant for tin oxide and indium tin oxide (ITO) layers in microelectronics applications. TE-100 effectively etches ITO and tin oxide films deposited on ceramics, dielectrics, semiconductors, and many metals. TE-100 provides excellent definition and etch rate control. Broad compatibility with positive and negative photoresists is offered. TE-100 is not compatible with nickel, copper, nichrome, and aluminum.
APPLICATION:
ITO films are best prepared by first depositing a film of indium-tin. The indium-tin film is then oxidized in an oxygen plasma or at elevated temperatures in an oxygenating atmosphere. When etched, indium is solublized as a trivalent aquocomplex [In(H2O)6]3+ while tin forms a [SnCl6]2- anion.
PROPERTIES OF TRANSENE TIN OXIDE INDIUM ETCHANT TE-100
How do I increase the etch rate? | 1. The rate will approximately double with every 10°C increase in temperature. 2. Increase the rate of stirring or agitation. |
How do I reduce the etch rate? | Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%. |
Do I need to dilute the etchant? | No, it is ready to use. |
How do I reduce undercutting? | Increase the rate of stirring or agitation. |
Appearance | Brown |
pH | Acidic |
Etch Rate at 40-50°C | 15-20 Å/sec. |
Etch Capacity (rate declines at ~70%) | 100 g/gallon |
Shelf Life | 1 year |
Storage Conditions | Ambient |
Filtration | 1 um |
Recommended Operating Temperatures | 20-80oC (30-40oC most common) |
Rinse | Deionized water |
Photoresist Recommendations | KLT6000 Series, KLT 5300 Series, HARE SQ (SU-8 type), TRANSIST, or PKP-308PI |
Select Compatible Materials | Au, oxide, nitride, alumina
See https://transene.com/etch-compatibility/ for more details. |
Select Incompatible Materials | Al, Ni, Ti, Cu, Pd |
Compatible Plastics | HDPE, PP, Teflon, PFA, PVC |
Country of Origin | USA |
Availability | Stock item |
Available Sizes | Quart, Gallon, 5 Gallon, 55 Gallon |
Packaging | HDPE |
Packing | 4 gallons/case |
Isotropy | Isotropic |
Incompatible Chemicals | Strong bases, nitric acid |
Additional Information | Immersion or spray application |