Etchants Table Test

THIN FILM	TRANSENE ETCHANTS	OPERATING RANGE	RECOMMENDED PHOTORESISTS	APPLICATION
Al	ALUMINUM ETCHANTS TYPE A TYPE D TYPE F	@25 °C @ 40 °C 30 Å/sec 80 Å/sec 40 Å/sec 125 Å/sec 30 Å/sec 80 Å/sec	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Semiconductor & Integrated Circuits GaAs & GaP Devices AlSi Materials
Al₂O₃	TRANSETCH N TANTALUM ETCHANT 111	120 Å/min@180 °C 20-30 Å/sec@20 °C	SiO₂ PKP-308PI HARE SQ (SU-8)	Semiconductor Devices Sapphire
BOE	BUFFERED OXIDE ETCHANT	Variable	PKP-308PI HARE SQ (SU-8)	Semiconductor & Integrated Circuits
Cr	CHROMIUM ETCHANTS 1020 1020AC	@ 40 °C 40 Å/sec 32 Å/sec	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Thin Film Circuits Chrome Mask
Cr-Si Cr-SiO	CHROMIUM ETCHANT TFE	1000 Å/min @ 50 °C	PKP-308PI HARE SQ (SU-8)	Thin Film Circuits
Cu	COPPER ETCHANTS CE-100 CE-200 APS-100 Copper Etch 49-1 Copper Etch BTP	1 mil/min @ 40 °C 0.5 mil/min @ 40 °C 80 Å/sec @ 40 °C 22 Å/sec @ 30 °C 150 Å/sec @ 30 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	P.C.Boards Thin Film Circuits Ni Compatability Ni Compatability
GaAs	GALLIUM ARSENIDE GA ETCH 100 GA ETCH 200 GA ETCH 300 AB ETCH	100 Å/sec @ 40 °C 20 Å/sec @ 5 °C 22 Å/sec @ 25 °C Defect Delineation	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Microelectronic Circuits Semiconductor Testing
GaN	GALLIUM NITRIDE	80 A/min	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	LED
Ga₂O₃	GALLIUM OXIDE	10 Å/sec @ 25 °C	PKP-308PI HARE SQ (SU-8)	Microelectronic Circuits
GaP	GALLIUM PHOSPHIDE	A Face(Ga): 115 micron/hr @ 80 °C B Face (P): 210 micron/hr @ 80 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Light Emitting Diodes
Ge	GERMANIUM	250 Å/sec @ 20 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Semiconductor Devices
Au	GOLD ETCHANTS TFA TFAC GE-8148 GE-8110 GE-8111	28 Å/sec @ 25 °C 30 Å/sec @ 60 °C 50 Å/sec @ 25 °C 15 Å/sec @ 25 °C 15 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Thin Film Circuits GaAs compatible Ni compatible Ni compatible Ni compatible
Hf, HfO	HAFNIUM, HAFNIUM OXIDE	45 Å/sec @ 25 °C ALD HfO 7.5 Å/sec	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Use Titanium Etch TFT
In₂O₃ ITO	INDIUM OXIDE INDIUM TIN OXIDE	15 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Microelectronic Circuits
InP	INDIUM PHOSPHIDE	30 mins @ 25 °C	PKP-308PI HARE SQ (SU-8)	Microelectronic Circuits
Fe₂O₃	IRON OXIDE MASK ETCHANT ME-10 ME-30	50 Å/sec @ 25 °C 25 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Microelectronic Circuits
Polyimide	KAPTON POLYIMIDE ETCHANT	0.013 mil/min @ 40 °C 0.07 mil/min @ 60 °C	PKP-308PI HARE SQ (SU-8)	Polyimide/Copper Clad Laminates
MgO	Magnesium Oxide Etchant MgOX12	40 Å/sec @ 30°C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST
Mo	MOLY ETCHANT TFM	55 Å/sec @ 30 °C 85 Å/sec @ 60 °C	PKP-308PI HARE SQ (SU-8) TRANSIST	Microelectronic Circuits
Nb NbN NbO	Niobium Niobium Nitride Niobium Oxide	50Å / sec @ 25 ^oC	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Microelectronics
Ni-Cr	NICHROME ETCHANTS TFN	50 Å/sec @ 40 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Thin Film Circuits
Ni	NICKEL ETCHANTS TFB TFG Type I	30 Å/sec @ 25 °C 50 Å/sec @ 40 °C 3 mil/hr @ 40 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Thin Film Circuits
Ni-V	Nickel-Vanadium Etch	30 Å/sec @ 20 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Microelectronics
Pd	PALLADIUM ETCHANTS TFP	110 Å/sec @ 50 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Semiconductor & Thin Film Circuits
Pd	PALLADIUM ETCHANT EC		KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Electrochemical Etching
	REAGENT SEMICONDUCTOR ETCHANTS (RSE)		PKP-308PI HARE SQ (SU-8)
Ru	RUTHENIUM ETCH	20 Å/sec @ 20 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Microelectronics
	SEMICONDUCTOR DEFECT DELINEATION ETCHANTS
Si	REAGENT SEMICONDUCTOR ETCHANTS (RSE) SILICON SLOW ETCH SILICON MESA ETCH PREFERENTIAL SILICON ETCHANTS PSE 200 PSE 300 SOLAR CELL ETCHANTS SCE-200 SCE-300 WRIGHT ETCHANT WRIGHT-JENKINS ETCHANT SIRTL ETCHANT	Variable Variable Variable 1 mil/3 min @ 100 °C 25 m/hr @ 100 °C 1 hr @ 75-100 °C 5-10 min @ 118 °C Defect Characterization Defect Characterization Defect Characterization	PKP-308PI HARE SQ (SU-8)	Semiconductor Devices Semiconductor Devices MEMS Semiconductors Solar Cells Semiconductor Testing Semiconductor Testing Semiconductor Testing
SiC	SILICON CARBIDE	80 Å/min	PKP-308PI HARE SQ (SU-8)	LED
SiO₂	BUFFER HF IMPROVED BD ETCHANT TIMETCH SILOX VAPOX III AIPAD Etch 639 BUFFERED OXIDE ETCHANTS (BOE)	800Å/min @ 25 °C Thermally Grown Variable 90 Å/min @ 25 °C 4000 Å/min @ 22 °C 5000 Å/min Variable	PKP-308PI HARE SQ (SU-8)	Semiconductor & Integrated Circuits PSG/BSG CVD CVD, Al Compatible Al Compatible
SiO	SILICON MONOXIDE ETCH	5000 Å/min @ 85 °C	PKP-308PI HARE SQ (SU-8)	Semiconductor Devices
Si₃N₄	TRANSETCH N	125 Å/min @ 180 °C	SiO₂ (Silox)	Semiconductor & Integrated Circuits
Ag	SILVER ETCHANT TFS	200 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Semiconductor & Thin Film Circuits
Stainless Steel	Nickel Etch Type I	45 Å/sec @ 25 °C, AISI 316	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Alloys
Ta Ta₃N₅ Ta₂O₅	SIE-8607 Ta Etch 111	70 Å/sec @ 25 °C 30 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Capacitors Semiconductors
TaSi	Tantalum Silicide Etch	50 Å/sec @ 20 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Thin Film Electronics
Sn, SnO	Tin, Tin Oxide	15 Å/sec @ 25 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Microelectronic Circuits
Ti	TITANIUM ETCHANTS TFT TFTN	25 Å/sec @ 20 °C (TFT) 50 Å/sec @ 30 °C (TFT) 10 Å/sec @ 70 °C (TFTN) 50 Å/sec @ 85 °C (TFTN)	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Integrated Circuits SiO₂ Compatible
TiN	Titanium Nitride Etch	30 Å/sec @ 20 °C	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI	Microelectronics
Ti-W	TI-TUNGSTEN ETCHANT TiW-30	20-30 Å/sec	KLT6000 Series KLT 5300 Series HARE SQ (SU-8) PKP-308PI TRANSIST	Thin Film Circuits Adhesion Layer
W	TUNGSTEN ETCH TFW	60 Å/sec @ 30 °C	PKP-308PI HARE SQ (SU-8)	Integrated Circuits
	ELECTRONIC GRADE CHEMICALS (SOLVENTS, ACIDS)

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