Semiconductor and Thin Film Etchants for Microelectronic Circuits

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THIN FILM TRANSENE ETCHANTS OPERATING RANGE RECOMMENDED RESIST APPLICATION

Al

 

ALUMINUM ETCHANTS

TYPE A

TYPE D

TYPE F

@25 °C @ 40 °C

30 Å/sec 80 Å/sec

40 Å/sec 125 Å/sec

30 Å/sec 80 Å/sec

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)

Semiconductor & Integrated Circuits

GaAs & GaP Devices

AlSi Materials

Al2O3 TRANSETCH N 120 Å/min @ 180 °C SiO2, PKP II
HARE SQ
Semiconductor Devices
BOE BUFFERED OXIDE ETCHANT Variable PKP Type II
HARE SQ (SU-8)
Semiconductor & Integrated Circuits
Cr CHROMIUM ETCHANTS

     1020

     1020AC

@ 40 °C

40 Å/sec

32 Å/sec

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Thin Film Circuits
Chrome Mask
Cr-Si

Cr-SiO

CHROMIUM ETCHANT TFE 1000 Å/min @ 50 °C PKP Type II
HARE SQ
Thin Film Circuits
Cu COPPER ETCHANTS

CE-100

CE-200

APS-100

Copper Etch 49-1

Copper Etch BTP

 

1 mil/min @ 40 °C

0.5 mil/min @ 40 °C

80 Å/sec @ 40 °C

22 Å/sec @ 30 °C

150 Å/sec @ 30 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)

 

P.C.Boards

Thin Film Circuits

Ni Compatability

Ni Compatability

GaAs GALLIUM ARSENIDE

     GA ETCH 100

     GA ETCH 200

     GA ETCH 300

     AB ETCH

 

100 Å/sec @ 40 °C

20 Å/sec @ 5 °C

22 Å/sec @ 25 °C

Defect Delineation

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)

 

Microelectronic Circuits

Semiconductor Testing

GaN GALLIUM NITRIDE

80 A/min KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
LED
Ga2O3 GALLIUM OXIDE 10 Å/sec @ 25 °C PKP Type II
HARE SQ
Microelectronic Circuits
GaP GALLIUM PHOSPHIDE A Face(Ga):

115 micron/hr @ 80 °C

B Face (P):

210 micron/hr @ 80 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Light Emitting Diodes
Ge GERMANIUM 250 Å/sec @ 20 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Semiconductor Devices
Au GOLD ETCHANTS

     TFA

     TFAC

     GE-8148

     GE-8110

     GE-8111

 

28 Å/sec @ 25 °C

30 Å/sec @ 60 °C

50 Å/sec @ 25 °C

15 Å/sec @ 25 °C

15 Å/sec @ 25 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)

 

Thin Film Circuits

GaAs compatible

Ni compatible

Ni compatible

Ni compatible

Hf, HfO HAFNIUM, HAFNIUM OXIDE 45 Å/sec @ 25 °C

ALD HfO 7.5 Å/sec

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Use Titanium Etch TFT
In2O3
ITO
INDIUM OXIDE
INDIUM TIN OXIDE
15 Å/sec @ 25 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronic Circuits
InP INDIUM PHOSPHIDE 30 mins @ 25 °C PKP Type II
HARE SQ
Microelectronic Circuits
Fe2O3 IRON OXIDE MASK
ETCHANT

     ME-10

     ME-30

 

 

50 Å/sec @ 25 °C

25 Å/sec @ 25 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronic Circuits
Polyimide KAPTON POLYIMIDE
ETCHANT
0.013 mil/min @ 40 °C

0.07 mil/min @ 60 °C

PKP Type II
HARE SQ (SU-8)
Polyimide/Copper Clad Laminates
MgO Magnesium Oxide Etchant MgOX12 40 Å/sec @ 30°C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Mo MOLY ETCHANT TFM 55 Å/sec @ 30 °C

85 Å/sec @ 60 °C

PKP Type II
HARE SQ
Microelectronic Circuits
Nb

NbN

NbO

Niobium

Niobium Nitride

Niobium Oxide

50Å / sec @ 25 oC KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronics
Ni-Cr NICHROME ETCHANTS

     TFN

50 Å/sec @ 40 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Thin Film Circuits
Ni NICKEL ETCHANTS

     TFB

     TFG

     Type I

 

30 Å/sec @ 25 °C

50 Å/sec @ 40 °C

3 mil/hr @ 40 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Thin Film Circuits
Ni-V Nickel-Vanadium Etch 30 Å/sec @ 20 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronics
Pd PALLADIUM ETCHANTS

     TFP

110 Å/sec @ 50 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Semiconductor & Thin Film Circuits
Pd PALLADIUM ETCHANT

     EC

  KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Electrochemical Etching
  REAGENT SEMICONDUCTOR ETCHANTS (RSE) PKP Type II
HARE SQ (SU-8)
Ru RUTHENIUM ETCH 20 Å/sec @ 20 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronics
  SEMICONDUCTOR DEFECT DELINEATION ETCHANTS
Si REAGENT SEMICONDUCTOR ETCHANTS (RSE)

SILICON SLOW ETCH

SILICON MESA ETCH

PREFERENTIAL SILICON ETCHANTS
     PSE 200

     PSE 300

SOLAR CELL ETCHANTS
     SCE-200

     SCE-300

WRIGHT ETCHANT

WRIGHT-JENKINS ETCHANT

SIRTL ETCHANT

 

 

 

Variable

Variable

Variable

1 mil/3 min @ 100 °C

25 m/hr @ 100 °C

1 hr @ 75-100 °C

5-10 min @ 118 °C

Defect Characterization

Defect Characterization

Defect Characterization

PKP Type II
HARE SQ

 

 

 

Semiconductor
Devices

Semiconductor
Devices

MEMS

Semiconductors

Solar Cells

Semiconductor Testing

Semiconductor Testing

Semiconductor Testing

SiC SILICON CARBIDE 80 Å/min PKP Type II
HARE SQ (SU-8)
LED
SiO2 BUFFER HF IMPROVED

BD ETCHANT

TIMETCH

SILOX VAPOX III

AIPAD Etch 639

BUFFERED OXIDE ETCHANTS (BOE)

800Å/min @ 25 °C
Thermally Grown

Variable

90 Å/min @ 25 °C

4000 Å/min @ 22 °C

5000 Å/min

Variable

PKP Type II
HARE SQ
Semiconductor & Integrated Circuits

PSG/BSG

CVD

CVD, Al Compatible

Al Compatible

SiO SILICON MONOXIDE ETCH 5000 Å/min @ 85 °C PKP Type II
HARE SQ
Semiconductor Devices
Si3N4 TRANSETCH N 125 Å/min @ 180 °C SiO2 (Silox) Semiconductor & Integrated Circuits
Ag SILVER ETCHANT TFS 200 Å/sec @ 25 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Semiconductor & Thin Film Circuits
Stainless Steel Nickel Etch Type I 45 Å/sec @ 25 °C, AISI 316 KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Alloys
Ta
Ta3N5
Ta2O5
SIE-8607
Ta Etch 111
70 Å/sec @ 25 °C
30 Å/sec @ 25 °C
KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Capacitors

Semiconductors

TaSi Tantalum Silicide Etch 50 Å/sec @ 20 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Thin Film Electronics
Sn, SnO Tin, Tin Oxide 15 Å/sec @ 25 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronic Circuits
Ti TITANIUM ETCHANTS

     TFT

     TFTN

25 Å/sec @ 20 °C

50 Å/sec @ 30 °C

10 Å/sec @ 70 °C

50 Å/sec @ 85 °C

KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Integrated Circuits

 

SiO2 Compatible

TiN Titanium Nitride Etch 30 Å/sec @ 20 °C KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Microelectronics
Ti-W TI-TUNGSTEN ETCHANT TiW-30 20-30 Å/sec KLT6000 Series
KLT 5300 Series
HARE SQ (SU-8)
Thin Film Circuits
Adhesion Layer
W TUNGSTEN ETCH TFW 140 Å/sec @ 30 °C PKP Type II
HARE SQ
Integrated Circuits
  ELECTRONIC GRADE CHEMICALS (SOLVENTS, ACIDS)